| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a probe inspection method and surface shape measurement device that can easily detect the presence or absence of an abnormality such as abrasion or defect of a probe, and can secure the reliability of a measured value.SOLUTION: The probe inspection method includes the steps of: acquiring a first measured value by measuring a surface 2a to be measured of a master 2 with an unused probe 11; acquiring a second measured value by measuring a surface 2a to be measured of the master 2 with a probe 11A after its use for a predetermined period; and inspecting the deterioration state of the probe 11 by comparing the first measured value with the second measured value.</p> |
