发明名称 |
METHOD FOR OFF-GRID ROUTING STRUCTURES UTILIZING SELF ALIGNED DOUBLE PATTERNING (SADP) TECHNOLOGY |
摘要 |
A method for efficient off-track routing and the resulting device are disclosed. Embodiments include: providing a hardmask on a substrate; providing a plurality of first mandrels on the hardmask; providing a first spacer on each side of each of the first mandrels; providing a plurality of first non-mandrel regions of the substrate being separated from the first mandrels and between two of the first spacers, each of the first mandrels, first non-mandrel regions, and first spacers having a width equal to a distance; and providing a second mandrel having a width of at least twice the distance and being separated from one of the first non-mandrel regions by a second spacer. |
申请公布号 |
US2015028489(A1) |
申请公布日期 |
2015.01.29 |
申请号 |
US201414513834 |
申请日期 |
2014.10.14 |
申请人 |
GLOBALFOUNDRIES Inc. |
发明人 |
YUAN Lei;KYE Jongwook;LEVINSON Harry |
分类号 |
H01L23/498;H01L21/768 |
主分类号 |
H01L23/498 |
代理机构 |
|
代理人 |
|
主权项 |
1. A device comprising:
an integrated circuit (IC) formed on a substrate; a plurality of metal routes extending horizontally on the substrate and placed on one of a plurality of equally spaced vertical positions being separated by a distance; and a metal route of the metal routes positioned on one of the vertical positions and extending vertically onto at least a midpoint between the one vertical position and another vertical position. |
地址 |
Grand Cayman KY |