CYLINDRICAL MOLDING TOOL, CYLINDRICAL CERAMIC MOLDING AND PRODUCTION METHOD FOR THE MOLDING

摘要

PROBLEM TO BE SOLVED: To provide a cylindrical ceramic molding for sputtering targets which has a shape quite close to an intended appearance shape and is reduced in variation of the thickness.SOLUTION: A cylindrical molding tool includes a columnar core rod 9 made of a rigid material, a cylindrical frame mold 3 which is composed of an elastic material and arranged concentrically outside the core rod and a lid body 4 which is composed of an elastic material, supports the core rod and the frame mold from the axial direction and consists of an upper lid 4a and a lower lid 4. The upper lid and the lower lid constituting the lid body each have a hollow disk-like shape and are provided with a through hole 8 to be engaged with the core rod and supported to the core rod so as to be movable in the axial direction. Using the cylindrical molding tool 1a, a cylindrical ceramic molding 11 is obtained by a cold isostatic press. The cylindrical ceramic molding 11 is baked in e.g. an electric furnace to form a cylindrical ceramic sintered body. A cylindrical ceramic sputtering target is obtained by griding the cylindrical ceramic sintered body.