发明名称 METHOD OF FABRICATING SEMICONDUCTOR DEVICE HAVING DIELECTRIC LAYER WITH IMPROVED ELECTRICAL CHARACTERISTICS
摘要 A semiconductor device having a dielectric layer with improved electrical characteristics and associated methods, the semiconductor device including a lower metal layer, a dielectric layer, and an upper metal layer sequentially disposed on a semiconductor substrate and an insertion layer disposed between the dielectric layer and at least one of the lower metal layer and the upper metal layer, wherein the dielectric layer includes a metal oxide film and the insertion layer includes a metallic material film.
申请公布号 US2015031186(A1) 申请公布日期 2015.01.29
申请号 US201414510302 申请日期 2014.10.09
申请人 KIM Youn-soo;CHOI Jae-hyoung;CHO Kyu-ho;KIM Wan-don;LIM Jae-soon;KANG Sang-yeol 发明人 KIM Youn-soo;CHOI Jae-hyoung;CHO Kyu-ho;KIM Wan-don;LIM Jae-soon;KANG Sang-yeol
分类号 H01L49/02 主分类号 H01L49/02
代理机构 代理人
主权项
地址 Yongin-si KR
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