发明名称 PREDICTIVE MAINTENANCE FOR THIRD PARTY SUPPORT EQUIPMENT
摘要 <p>A server receives equipment data from third party support equipment during operation of the third party support equipment in a manufacturing environment. The server receives the equipment data via a first port on the third party support equipment. The third party support equipment communicates with a process tool via a second port on third party support equipment. The server determines a future state of the third party support equipment based on the equipment data and notifies a user of the future state of the third party support equipment.</p>
申请公布号 KR101488181(B1) 申请公布日期 2015.01.30
申请号 KR20137016805 申请日期 2011.11.30
申请人 发明人
分类号 G05B19/418;G05B23/00 主分类号 G05B19/418
代理机构 代理人
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