LOW FRICTION COATING LAYER, LOW FRICTION COATING METHOD AND LOW FRICTION COATING APPARATUS

摘要

Disclosed herein is a low friction coating layer wherein the uniform concentration of a low friction metal in the coating layer is increased by increasing a turning-on power of a low friction metal source to be higher than a turning-off power thereof, decreasing a turning-on power of a Ti source to be lower than a turning-off power thereof. Alternatively the concentration is increased by increasing a flow rate or temperature of a nitrogen atmosphere gas upon introduction to be higher than upon termination of the introduction thereof.