| 摘要 |
<p>In the present invention, an ultrasonic sensor is realized in which while connecting an electrode of a piezoelectric element to a wiring member without interposing a case, high connection accuracy between the piezoelectric element and the case can be achieved, and favorable oscillation characteristics and sensitivity characteristics can be obtained. An ultrasonic sensor (1) has the following: a closed-bottom tubular case (2) comprising a recessed part (2B1) having a bottom surface that is an oscillation region; and a piezoelectric element (3) comprising a piezoelectric substrate (3E) having a first surface and a second surface facing the first surface, a first electrode (3A) provided on the first surface, a second electrode (3B) provided to a portion of the second surface, and a third electrode (3C) provided to a portion of the second surface, spaced apart from the second electrode (3B), and connected to the first electrode (3A), and the piezoelectric element is configured so that the first electrode (3A) is connected to the bottom of the recessed part (2B1) and so that the piezoelectric element is disposed at a position such that the center of the bottom surface of the piezoelectric element is, in plan view, different from the center of an oscillation region.</p> |
