发明名称 超音波トランスデューサー、超音波センサー、超音波トランスデューサーの製造方法、および超音波センサーの製造方法
摘要 <p>An ultrasonic transducer includes: a support member having an opening section; a diaphragm adapted to cover the opening section; and a piezoelectric member provided to the diaphragm and at least one of expanding and contracting in an in-plane direction in response to application of a voltage, wherein the diaphragm has a concave groove section formed to have a concave shape on a surface on an opposite side to one side exposed to the opening section, and the piezoelectric member is fixed to the diaphragm in an area outside the concave groove section, and disposed to cover the concave groove section so as to be opposed to a bottom of the concave groove section via a space.</p>
申请公布号 JP5671876(B2) 申请公布日期 2015.02.18
申请号 JP20100182113 申请日期 2010.08.17
申请人 发明人
分类号 H04R17/00 主分类号 H04R17/00
代理机构 代理人
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地址
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