摘要 |
<p>A semiconductor device is provided that includes a semiconductor substrate having a well region located within an upper region thereof. A semiconductor material stack is located on the well region. The semiconductor material stack includes, from bottom to top, a semiconductor-containing buffer layer and a non-doped semiconductor-containing channel layer; the semiconductor-containing buffer layer of the semiconductor material stack is located directly on an upper surface of the well region. The structure also includes a gate material stack located directly on an upper surface of the non-doped semiconductor-containing channel layer. The gate material stack employed in the present disclosure includes, from bottom to top, a high k gate dielectric layer, a work function metal layer and a polysilicon layer.</p> |