发明名称 高K/金属ゲートMOSFETを有するVt調整及び短チャネル制御のための構造体及び方法。
摘要 <p>A semiconductor device is provided that includes a semiconductor substrate having a well region located within an upper region thereof. A semiconductor material stack is located on the well region. The semiconductor material stack includes, from bottom to top, a semiconductor-containing buffer layer and a non-doped semiconductor-containing channel layer; the semiconductor-containing buffer layer of the semiconductor material stack is located directly on an upper surface of the well region. The structure also includes a gate material stack located directly on an upper surface of the non-doped semiconductor-containing channel layer. The gate material stack employed in the present disclosure includes, from bottom to top, a high k gate dielectric layer, a work function metal layer and a polysilicon layer.</p>
申请公布号 JP5669954(B2) 申请公布日期 2015.02.18
申请号 JP20130541985 申请日期 2011.09.15
申请人 发明人
分类号 H01L21/336;H01L21/28;H01L21/8234;H01L21/8238;H01L27/088;H01L27/092;H01L29/423;H01L29/49;H01L29/78;H01L29/786 主分类号 H01L21/336
代理机构 代理人
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