| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a dicing device and a dicing method in which the relative position of a cutter set mechanism, a blade, and a work table is detected easily in non-contact, and high precision can be maintained. <P>SOLUTION: Relative positions of a spindle 3 and a work table 4, the spindle 3 and a blade 2, and the spindle 3 and a work W are calculated by measuring the distance between the spindle 3 and the work table 4, the distance between the spindle 3 and a reference position member 16, or the distance between the spindle 3 and the work W with a measuring means 18. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
