| 发明名称 |
研磨装置 |
| 摘要 |
|
| 申请公布号 |
JP5682842(B2) |
申请公布日期 |
2015.03.11 |
| 申请号 |
JP20130197456 |
申请日期 |
2013.09.24 |
| 申请人 |
|
发明人 |
|
| 分类号 |
B24B31/00 |
主分类号 |
B24B31/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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