| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an EUV mask, the surface of which is effectively cooled (temperature-regulated) during light exposure, and a mask blank.SOLUTION: In a reflective mask blank, a multilayer reflection layer 2, a protective layer 3, and an absorber layer 4 are sequentially stacked on one surface (front side) of a base plate 1. The reflective mask blank is characterized as follows: heat conduction layers 6t, 6b and 6s are formed on the front and back sides of the base plate 1 and a side surface thereof, respectively; and the heat conduction layers are made of a material including carbon or solid metal.</p> |
