SCANNING TRANSMISSION ELECTRON MICROSCOPY AND METHOD OF MEASURING ABERRATION OF THE SAME

摘要

PROBLEM TO BE SOLVED: To solve the problem in which an error tends to occur when obtaining aberration information from a Ronchigram.SOLUTION: Aberration are measured using a Ronchigram (focus modulation Ronchigram) obtained by minutely changing in a height direction a positional relation of a focal point of an electron probe imaged on a specimen surface or in the vicinity thereof and a specimen when imaging one sheet of Ronchigram.