发明名称 多結晶シリコンロッドの破砕方法
摘要 <p>In the present invention, an impact force (F1) (first impact force) having a dynamic component in the direction of a center axis (C) is applied to one end of a polycrystalline silicon rod (10). The impact force (striking force) (F1) generates an elastic wave (first elastic wave) within the polycrystalline silicon rod (10), and by means of this elastic wave, the rod is fractured into polycrystalline silicon lumps having a fracture surface (1) splitting the center axis (C) of the polycrystalline silicon rod (10). The polycrystalline silicon rod is an assembly of crystal grains and there are localized variations in strength within the rod, and so the impact force applied acts effectively at the portions of localized weakness in strength and it is possible to achieve fracturing across the entire length even if the polycrystalline silicon rod is long.</p>
申请公布号 JP5689382(B2) 申请公布日期 2015.03.25
申请号 JP20110162384 申请日期 2011.07.25
申请人 发明人
分类号 C01B33/02 主分类号 C01B33/02
代理机构 代理人
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