发明名称 |
Process for treating gaseous effluents coming from the manufacture of electronic components and incineration apparatus for carrying out said process |
摘要 |
A process and apparatus for treating waste products coming from the manufacture of electronic components. The effluent gases are aspirated by an inert vehicle gas, then intimately mixed with a preheated oxidizing gas, then remain in contact therewith at a sufficient temperature and for a sufficient period of time for the incineration, then the products of oxidation are cooled by thermal exchange to condensation, and the solid products of oxidation are collected and the residual gases washed, and there is realized a cascade of pressure drops along the gaseous current.
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申请公布号 |
US4886444(A) |
申请公布日期 |
1989.12.12 |
申请号 |
US19880217457 |
申请日期 |
1988.07.11 |
申请人 |
L'AIR LIQUIDE |
发明人 |
HIRASE, IKUO;RUFIN, DENIS |
分类号 |
B01D53/34;B01D53/38;B01D53/46;B01D53/68;B01D53/81;F23G7/06;H01L21/205 |
主分类号 |
B01D53/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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