发明名称 銅エッチング廃液の処理方法
摘要 <p>[Problem] To decompose hydrogen peroxide in a copper etching waste liquor that contains hydrogen peroxide at a high concentration, with high efficiency. [Solution] A method of treating a copper etching waste liquor containing hydrogen peroxide, which comprises adjusting the copper etching waste liquor to pH 4 or more. When a copper etching waste liquid, which is usually a strongly acidic solution having a pH value of 3 or less, is adjusted to pH 4 or more, a copper-containing SS is generated, and the generated SS acts as a catalyst for the decomposition of hydrogen peroxide. Therefore, hydrogen peroxide in the copper etching waste liquid can be decomposed with high efficiency only by adjusting the copper etching waste liquor to pH 4 or more, without the need of dilution or heating, and without the use of any chemical substance other than an alkali agent that is used for adjusting the pH value.</p>
申请公布号 JP5696406(B2) 申请公布日期 2015.04.08
申请号 JP20100201158 申请日期 2010.09.08
申请人 发明人
分类号 C02F1/58;C02F1/62 主分类号 C02F1/58
代理机构 代理人
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