发明名称 インプリント装置及び転写欠陥検出方法
摘要 <p><P>PROBLEM TO BE SOLVED: To easily detect a defect that occurs when a desired pattern formed in a mold is transferred to a molding material to form a molded article. <P>SOLUTION: When a release force that is applied in the case of mold releasing for separating a molded article and a mold 30 is detected and the molded article is continuously molded, a control section 50 determines whether there is a transfer defect in the molded article after transferring according to a variation in the detected release force to achieve transfer defect detection. <P>COPYRIGHT: (C)2012,JPO&INPIT</p>
申请公布号 JP5707125(B2) 申请公布日期 2015.04.22
申请号 JP20100291024 申请日期 2010.12.27
申请人 发明人
分类号 B29C59/02;H01L21/027 主分类号 B29C59/02
代理机构 代理人
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