| 摘要 |
<p>An object of the present invention is to provide a crucible handling device that can firmly sandwich and reliably move a quartz glass crucible under a clean environment and a method of handling a quartz glass crucible using the crucible handling device. The present invention provides a crucible handling device (1) for handling a quartz glass crucible (5), the device including: a frame (4) having a beam (2) extending in a horizontal direction and a pair of arms (3) protruding from the beam (2) in a direction perpendicular to a central axis line direction of the beam (2) such that at least one of the arms (3) is able to move in the central axis line direction of the beam (2); a pair of sandwiching means (6) assembled with the pair of the arm (3) to face each other, for sandwiching a body (50) of the quartz glass crucible (5) in a radial direction of the crucible; engagement means (7) provided adjacent to each sandwiching means (6) and formed by a pair of tongues (70) movable to approach or be separated from each other in a central axis direction of the crucible, for sandwiching and holding the quartz glass crucible (5) therebetween in the central axis direction of the crucible; and driving means (8) for causing the sandwiching means (6) and the engagement means (7) to reciprocate along the arm (3). The present invention also provides a method of handling a quartz glass crucible using such a device (1) as described above.</p> |
