SECTION PROCESSING METHOD, SECTION PROCESSING APPARATUS

摘要

Provided are a method and an apparatus for processing a cross section, which can form the flat cross section by a focused ion beam to samples made of materials having different hardness. Based on cross section information on SEM obtained by observation of the cross section, irradiation interval and irradiation time of the focused ion beam is variably controlled, and an etching process of a processing area is performed. Accordingly, even if the samples consist of materials having different hardness, a flat observational surface can be formed by a uniform etching rate.