| 摘要 |
PURPOSE:To shorten the downtime of a production apparatus and to provide the above mechanism which is clean and highly safe by detecting the volume of the processing liquid stored in a processing liquid storage means and properly replenishing the processing liquid in accordance with the detected value of the volume of the processing liquid. CONSTITUTION:The processing liquid is stored by a storage tank 13 and the volume of the processing liquid stored in the tank 13 is detected by an upper limit sensor 31 and a lower limit sensor 32. The processing liquid is automatically stored in the tank 13 in accordance with the detection by the sensors 31, 32 in a spare tank 15 and further the processing liquid is delivered from the tank 13 to an object 28 to be processed in processing liquid delivering means 23, 24, 26. As a result, the replenishment of the processing liquid and the preprocessing are executed automatically, by which the downtime of the production apparatus is shortened and the clean and highly safe device is obtd. |
