METHOD FOR MANUFACTURING ORGANIC EMITTING DISPLAY DEVICE AND DISPLAY DEVICE APPLYING THE SAME

摘要

The present invention relates to a method for manufacturing an organic light emitting display device, which can lengthen a life while saving costs and improving reliability, by varying a method for forming a thin film laminated body for sealing (encapsulating) an organic light emitting device. Regarding a method for manufacturing an organic light emitting display device containing at least a pair of laminated barriers of an inorganic film and an organic film that seal an organic light-emitting element formed on a substrate, a method for forming the inorganic film comprises: a step of supplying trimethylaluminum (Al_2(CH_3)_6) on a substrate containing the organic light-emitting element array and making a first ozone (O_3) gas as a reactant gas to form a first aluminum oxide (Al_2O_3) film; a step of supplying trimethylaluminum (Al_2(CH_3)_6) on the first aluminum oxide film and making H_2O gas as a reaction gas to form a second aluminum oxide film (Al_2O_3); and a step of supplying trimethylaluminum on the second aluminum oxide film and making a second ozone gas as a reaction gas to form a third aluminum oxide film (Al_2O_3).