| 摘要 |
<p>Provided is a rack for firing which holds a plurality of flat board-like setters at multiple levels in the perpendicular direction by means of a setter holding means, and fires electronic ceramic elements at multiple levels. The setter holding means is composed of a material composed of Si-SiC containing 0.01-30 % of Si or recrystallized SiC or Si3N4-SiC, and the setter holding means holds each of the flat board-like setters with 70-100 % of the outer circumferential side surface thereof exposed. Consequently, the rack has excellent energy efficiency, mass-production efficiency, and uniform heating characteristics at each of the multiple levels in the multiple-level firing.</p> |
