| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to read an ID mark formed on any surface of a wafer while reducing cost of an ID mark reader.SOLUTION: In an ID mark reader which comprises reading means 13 for reading an ID mark 53 formed on a wafer 50 held by holding means 12, the reading means 13 includes one and more mirrors 321, 322, a read part 31 for reading the ID mark 53 and a move part 33 for moving at least either of the mirrors 321, 322 or the read part 31. The reading means 13 controls the move part 33 so as to make the read part 31 be able to read the ID mark 53 directly or via the mirrors 321, 322 depending on whether the ID mark 53 is formed on either of a first surface 51 or a second surface 52 of the wafer 50 thereby to enable the ID mark 53 to be read by one read part 31 even though the ID mark 53 is formed on any surface of the wafer 50.</p> |
