摘要 |
<p><P>PROBLEM TO BE SOLVED: To output a high voltage near a target voltage in a short time. <P>SOLUTION: A high voltage power supply device 301 includes: a piezoelectric transducer 304 whose output voltage varies with driving frequency; output voltage conversion means 307 and first voltage comparison means 308 for feedback-controlling the driving frequency such that the output voltage matches a target voltage; and a high voltage control section 206 for setting a small variation in the driving frequency when a differential value between the output voltage and the target voltage is small, and on the other hand, a large variation in the driving frequency when the differential value is large. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |