发明名称 少なくとも一つの電気伝導性フィルムを基板上へ蒸着させる方法
摘要 <p>A method for deposition of at least one electrically conducting film on a substrate, wherein the method includes the steps of: selecting a layer of a film material, wherein the layer includes a mask on a front side, and wherein the layer and the mask are one piece; positioning the front side of the layer upon the substrate; applying at least one laser pulse onto a back side of the layer, so as to melt and to vaporize at least parts of the layer such that melt droplets are propelled toward and deposited upon the substrate; and forming the film, wherein at least one slot of the mask limits the distribution of the melt droplets.</p>
申请公布号 JP5731400(B2) 申请公布日期 2015.06.10
申请号 JP20110544961 申请日期 2010.01.11
申请人 发明人
分类号 C23C14/04;H01L21/288;H01L21/3205;H01L21/768 主分类号 C23C14/04
代理机构 代理人
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