| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To stably maintain a substrate to a tray in all cases even when a substrate-transferring mechanism to the tray is less accurately formed on transferring the substrate, and to reduce occurrence of displacement, damage, and dropping from the tray on transferring the substrate. <P>SOLUTION: In one embodiment, a pressing mechanism applies pressure to a substrate 102 to hold the substrate 102 by the first tray 106 when a substrate 102 is mounted to a first tray 106, the first tray 106 is mounted onto a second tray 107, and the substrate-transferring mechanism transfers the second tray 107 to a process chamber 109 in the condition that the second tray 107 is held inclined. Gas is fed into the process chamber 109 under a reduced pressure to deposit thin film on the substrate 102. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
