| 摘要 |
PROBLEM TO BE SOLVED: To provide a microwave plasma source capable of ensuring an expanse of plasma, and forming uniform surface wave plasma even when reducing the number of microwave radiation units.SOLUTION: A microwave plasma source 2 includes a microwave output unit 30, a microwave supply unit 40, and a microwave radiation plate 50. The microwave supply unit 40 includes a plurality of microwave guidance mechanisms 43 provided on peripheral part 50a of the microwave radiation member 50 along the circumferential direction. The microwave radiation plate 50 includes: a plurality of slot antenna units 124 which include a slot 123 for microwave radiation and are provided so that the whole shape becomes a circumferential shape along a microwave guidance mechanism arrangement region; and a microwave transmission member 122 which is provided at a position corresponding to that of the microwave guidance mechanism arrangement region in a circumferential shape so as to cover slots 123 and transmits microwaves radiated from the slots 123. |
