| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydrophilization treatment apparatus capable of efficiently performing hydrophilization treatment to the surface of an object to be treated by superheated steam containing hydroxy radical at high concentration, and a manufacturing method of a film.SOLUTION: A hydrophilization treatment apparatus comprises: an induction heating device 4 which inductively heats saturated steam to generate superheated steam; a treatment chamber 5 into which the superheated steam generated by the induction heating device 4 is introduced; and a discharge treatment device 6 which is arranged in the treatment chamber 5, and performs discharge treatment to the introduced superheated steam. The discharge treatment apparatus 6 has: a frame being a support body of the discharge treatment apparatus; a discharge electrode which is arranged on a top part of the frame, and in which an area around a central conductor is covered by an insulator; a mesh-like counter electrode arranged below the discharge electrode; and a high-frequency power source which supplies high-frequency and high-voltage power source between the discharge electrode and the counter electrode to generate barrier discharge, in which hydrophilization treatment is performed to the surface of an object to be treated positioned directly under the counter electrode by the superheated steam having hydroxy radical of increased concentration due to electric discharge. |
