Reduced stiffness micro-mechanical structure

摘要

Apparatuses and method are described to create a reduced stiffness microstructure (RSM). A RSM is made by forming a first buckled membrane along a first buckling direction and forming a second buckled membrane along a second buckling direction. The second buckling direction is opposite to the first buckling direction and the first buckled membrane is in contact with the second buckled membrane over a contact area. Within an operating zone, a stiffness of the reduced stiffness microstructure spring is less than an absolute value of a stiffness of either the first buckled membrane or the second buckled membrane when the contact area translates along either one of the buckling directions. In the operating zone the stiffness can approach or equal zero.

主权项

1. A microstructure, comprising:
a first substrate; a first buckled membrane, the first buckled membrane is connected to the first substrate, the first buckled membrane has a first curved shape, a first area, and has buckled along a first buckling direction; and a second buckled membrane, the second buckled membrane is connected to a second substrate, the second buckled membrane has a second curved shape, a second area, and has buckled along a second buckling direction, the second buckling direction is opposite to the first buckling direction, wherein the first buckled membrane and the second buckled membrane are in contact over a contact area, the contact area is less than the first area or the second area, the first buckled membrane has a first membrane stiffness when loaded over the contact area and displaced opposite to the first buckling direction, the second buckled membrane has a second membrane stiffness when loaded over the contact area and displaced opposite to the second buckling direction.