| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently remove air mixed in a liquid distribution chamber of a nozzle. <P>SOLUTION: A manifold 3b which is the liquid distribution chamber and a liquid flow path 3c leading from the manifold 3b to a discharge port 3a are formed inside the nozzle 3. The nozzle 3 has a pair of piece parts 31, 32 oppositely arranged to each other and each having the liquid flow path 3c and the discharge port 3a. The nozzle 3 also has a movement mechanism for adjusting an opening width of the discharge port 3a by relatively moving a pair of piece parts 31, 32 in a direction that a pair of piece parts 31, 32 approach to or are separated from each other. A liquid supply path 3d connected to the manifold 3b and supplying a coating liquid to the manifold 3b is formed in the nozzle 3. A discharge flow path 3e connected to the manifold 3b and discharging air with an excess portion of the coating liquid from the manifold 3b by the coating liquid supplied to the manifold 3b through the liquid supply flow path 3d when the discharge port 3a is closed by the movement mechanism is further formed in the nozzle 3. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
