THIN-FILM TRANSISTOR SUBSTRATE WITH PROTECTION FILM, AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a thin-film transistor substrate with a protection film and that can provide a high drive stability.SOLUTION: A thin-film transistor substrate includes: a thin-film transistor; and a protection film coating the thin-film transistor and formed of a cured product of a photosensitive siloxane composition. The thin-film transistor includes a semiconductor layer composed of an oxide semiconductor. The photosensitive siloxane composition contains: at least two kinds of polysiloxane having different alkali dissolution rates; a photosensitive agent; and a solvent.