| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a MEMS element which suppresses the generation of gas from an inner wall in a space in which a MEMS part is positioned.SOLUTION: A MEMS element includes a MEMS part 15 positioned in a space 61 covered by silicon nitride films 14, 36 and a silicon film 18. The MEMS part is arranged on the silicon nitride film. The silicon film is arranged above the MEMS part and adhered on the silicon nitride film positioned around the MEMS part. The silicon film has release holes 25, 26. The first hole is filled with a metal film 71. The metal film, the silicon nitride films, and the silicon film form an airtight structure.</p> |
