| 发明名称 |
ELECTRONIC FUSE WITH RESISTIVE HEATER |
| 摘要 |
An electronic fuse structure including an Mx level having a first Mx metal, and a second Mx metal, and an Mx+1 level having a first Mx+1 metal, a second Mx+1 metal, a first via, a second via, and a conductive path extending from the first via to the second via and partially encircling the first via, the first via extending vertically and electrically connecting the first Mx metal to the first Mx+1 metal, and the second via extending vertically and electrically connecting the second Mx metal to the second Mx+1 metal. |
| 申请公布号 |
US2015228578(A1) |
申请公布日期 |
2015.08.13 |
| 申请号 |
US201514695113 |
申请日期 |
2015.04.24 |
| 申请人 |
International Business Machines Corporation |
发明人 |
Bao Junjing;Bonilla Griselda;Choi Samuel S.;Filippi Ronald G.;Li Wai-Kin;Lustig Naftali E.;Simon Andrew H. |
| 分类号 |
H01L23/525 |
主分类号 |
H01L23/525 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An electronic fuse structure, the structure comprising:
an Mx level comprising a first Mx metal, and a second Mx metal; and an Mx+1 level comprising a first Mx+1 metal, a second Mx+1 metal, a first via, a second via, and a conductive path extending from the first via to the second via and partially encircling the first via, the first via extending vertically and electrically connecting the first Mx metal to the first Mx+1 metal, and the second via extending vertically and electrically connecting the second Mx metal to the second Mx+1 metal. |
| 地址 |
Armonk NY US |
