METHOD AND COATER FOR COATING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a coating method and a coater in which a sedimentary layer on a substrate has high homogeneity.SOLUTION: A coater for coating a substrate includes a cathode assembly 10 having a rotatable curved target 20, and two magnet assemblies 25 arranged in the rotatable curved target 20 of the cathode assembly 10. In the coater, a distance between the two magnet assemblies 25 can be changed during a coating process.