发明名称 研磨用組成物及び研磨方法
摘要 A polishing composition contains a polishing accelerator, a water-soluble polymer including a constitutional unit originating from a polymerizable compound having a guanidine structure such as dicyandiamide, and an oxidant. The water-soluble polymer may be a water-soluble polymer including a constitutional unit originating from dicyandiamide and a constitutional unit originating from formaldehyde, a diamine or a polyamine.
申请公布号 JP5774283(B2) 申请公布日期 2015.09.09
申请号 JP20100089698 申请日期 2010.04.08
申请人 发明人
分类号 H01L21/304;B24B37/00;C09K3/14 主分类号 H01L21/304
代理机构 代理人
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