发明名称 光学素子操作装置
摘要 The invention relates to an apparatus for manipulation of an optical element in up to six degrees of freedom with respect to a structure via at least three actuator devices. The actuator devices each have at least two force-controlled actuators, which each produce an effective force along one degree of freedom, with linking points of the actuator devices acting directly on the optical element.
申请公布号 JP5779545(B2) 申请公布日期 2015.09.16
申请号 JP20120113006 申请日期 2012.05.17
申请人 发明人
分类号 G03F7/20;G02B7/182;G02B26/08;G02B27/18 主分类号 G03F7/20
代理机构 代理人
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