| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To generate the backscattering intensity with higher accuracy by reducing the generation man-hour of parameters. <P>SOLUTION: In a method of generating the backscattering intensity of charged particles, parameters of a k-th layer is determined according to the mixture ratio obtained by the weighted mean of pattern area density from a first layer to a (k-1)th layer and the depth. Intensities of downward transmission electrons, reflection electrons and upward transmission electrons are determined, and the sum of the reflection electrons on the uppermost layer directly under a resist layer and the upward transmission electrons is output as the backscattering intensity to the resist layer. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
