发明名称 マイクロ機械的エレメントを動かすためのアクチュエータ
摘要 <p>The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as minor, the element being mechanically coupled to a frame with a bendable coupling, wherein actuator elements are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.</p>
申请公布号 JP5778677(B2) 申请公布日期 2015.09.16
申请号 JP20120529273 申请日期 2010.09.16
申请人 发明人
分类号 G02B26/00;B81B3/00;G02B26/02 主分类号 G02B26/00
代理机构 代理人
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