| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and apparatus for detecting a foreign matter in an image pickup device that can specifically determine the position, size, and shape of a foreign matter present on one of surfaces including a light receiving surface of an image pickup device and front and back surfaces of a transparent member such as a cover glass arranged in front of the light receiving surface. <P>SOLUTION: In the foreign matter detection apparatus according to the invention, an image pickup device package 2 is mounted on a mount part 50, and an image of a light receiving surface of an image pickup device 10 is captured while emitting illumination light from a light source part 60. The type of illumination light emitted from the light source part 60 toward the light receiving surface 10A is switched between, for example, parallel light and divergent light from a point light source. Images captured with illumination with respective types of illumination light are taken into a control/inspection part 80, and the three-dimensional position, size and shape of a foreign matter are specifically determined by comparing these images. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
