| 摘要 |
PROBLEM TO BE SOLVED: To provide a ferroelectric film including a non-lead material.SOLUTION: A ferroelectric film 12 comprises: a (KNa)NbOfilm or BiFeOfilm which has a perovskite structure; and a crystalline oxide 11, 13 formed on at least one surface of the (KNa)NbOor BiFeOfilm, and (001)-oriented preferentially, where X satisfies the following expression: 0.3≤X≤0.7. The (001) preferential orientation of the crystallinity oxide 11, 13 enables (001) orientation of the ferroelectric film 12 and thus, the piezoelectric property is enhanced. It is preferable that the crystallinity oxide 11, 13 is a bismuth layer structure of ferroelectric or tungsten-bronze type ferroelectric, which has a deformed perovskite structure. |
