ANTI-REFLECTION FILM, OPTICAL ELEMENT INCLUDING THE SAME, AND OPTICAL SYSTEM

摘要

Provided is an anti-reflection film, which is formed on substrate, the anti-reflection film having a laminated layer structure including, in order from the substrate: a first layer to a sixth layer each formed of a dielectric thin film; and a seventh layer formed by a wet process, in which the first to the sixth layers are formed of three kinds of mediums having different refractive indices from one another, and in which, when refractive indices of the three kinds of mediums at wavelength of 550 nm are defined as nL, nM, and nH, the first layer is formed of a medium having nM, the sixth layer is formed of a medium having nH, a layer formed of a medium having nL and a layer formed of a medium having off are spaced away from each other, and nL, nM, and nH are appropriately set.

主权项

1. An anti-reflection film, which is formed on a substrate, the anti-reflection film having a laminated layer structure comprising, in order from the substrate: a first layer to a sixth layer each formed of a dielectric thin film; and a seventh layer formed by a wet process,
wherein the first layer to the sixth layer are formed of three kinds of mediums having different refractive indices from one another, and wherein, when refractive indices of the three kinds of mediums at a wavelength of 550 nm are defined as nL, nM, and nH, the first layer is formed, of a medium having the refractive index of nM, the sixth layer is formed of a medium having the refractive index of nH, a layer formed of a medium having the refractive index of nL and a layer formed of the medium having the refractive index of nH are spaced away from each other, and the refractive indices nL, nM, and nH satisfy the following conditional expressions.
1.35≦nL≦1.501.40≦nM≦1.651.6≦nH≦2.2nL