发明名称 |
LASER OSCILLATION COOLING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a laser oscillation cooling device that has a sufficient cooling effect and can recover a cooling medium appropriately.SOLUTION: A laser oscillation cooling device comprises: a laser oscillation part that oscillates laser light and produces heat locally; a storage tank that can store cryogenic liquid at air pressure and discharge evaporating cryogenic liquid; a compression supply part that compresses the cryogenic liquid stored in the storage tank and supplies it to the laser oscillation part; and a decompression return part that decompresses the cryogenic liquid supplied to the laser oscillation part and used for cooling at the laser oscillation part and returns it to the storage tank. |
申请公布号 |
JP2015185601(A) |
申请公布日期 |
2015.10.22 |
申请号 |
JP20140058886 |
申请日期 |
2014.03.20 |
申请人 |
MITSUBISHI HEAVY IND LTD |
发明人 |
KASAHARA JIRO;KONDO YOSHIYUKI;ISHII SHINYA;HAMAMOTO KOICHI |
分类号 |
H01S3/042;H01L23/473;H05K7/20 |
主分类号 |
H01S3/042 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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