发明名称 LASER OSCILLATION COOLING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a laser oscillation cooling device that has a sufficient cooling effect and can recover a cooling medium appropriately.SOLUTION: A laser oscillation cooling device comprises: a laser oscillation part that oscillates laser light and produces heat locally; a storage tank that can store cryogenic liquid at air pressure and discharge evaporating cryogenic liquid; a compression supply part that compresses the cryogenic liquid stored in the storage tank and supplies it to the laser oscillation part; and a decompression return part that decompresses the cryogenic liquid supplied to the laser oscillation part and used for cooling at the laser oscillation part and returns it to the storage tank.
申请公布号 JP2015185601(A) 申请公布日期 2015.10.22
申请号 JP20140058886 申请日期 2014.03.20
申请人 MITSUBISHI HEAVY IND LTD 发明人 KASAHARA JIRO;KONDO YOSHIYUKI;ISHII SHINYA;HAMAMOTO KOICHI
分类号 H01S3/042;H01L23/473;H05K7/20 主分类号 H01S3/042
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