EVALUATION METHOD OF SEMICONDUCTOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an evaluation method of a semiconductor substrate capable of evaluating a state of a crystal defect of a semiconductor substrate even when there is no characteristic light emission.SOLUTION: The evaluation method of a semiconductor substrate having a crystal defect to which a defect recovery heat treatment is applied for recovering the crystal defect includes steps of: measuring intensity of band end light emission of the semiconductor substrate by using a luminescence method; and evaluating a degree of recovery of crystallinity of the semiconductor substrate on the basis of a result of the measurement.