| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition excellent in LWR (line width roughness) performance and defect inhibiting property.SOLUTION: The radiation-sensitive resin composition comprises: a polymer having a first structural unit that is derived from at least one compound selected from the group consisting of a N-substituted maleimide and a fumaric diester and that includes an acid dissociable group, and a second structural unit that contains no acid dissociable group; and a radiation-sensitive acid generator. The polymer is preferably an alternating copolymer. The second structural unit is preferably derived from at least one compound selected from the group consisting of a substituted or unsubstituted norbornene and a substituted or unsubstituted tetracyclododecene. The polymer preferably does not substantially contain an aromatic ring. |
