| 发明名称 |
METHOD OF MANUFACTURING A TRANSDUCER |
| 摘要 |
A method of manufacturing a tactile transducer includes providing a substrate; performing a surface treatment on the substrate by using an electrolysis system; depositing a buffer layer on the substrate; forming a layer of a piezoactive thin film on the substrate; baking the piezoactive thin film; annealing the piezoactive thin film; performing a poling process on the piezoactive thin film; and depositing a top electrode on the piezoactive thin film. |
| 申请公布号 |
US2015311426(A1) |
申请公布日期 |
2015.10.29 |
| 申请号 |
US201414260431 |
申请日期 |
2014.04.24 |
| 申请人 |
National Taiwan University |
发明人 |
TSENG Hong-Jie;TIAN Wei-Cheng;WU Wen-Jong |
| 分类号 |
H01L41/273;H04R31/00;H01L41/331;H01L41/29;H01L41/316;H01L41/317 |
主分类号 |
H01L41/273 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing a transducer, the method comprising the following steps:
providing a substrate; performing a surface treatment on the substrate by using an electrolysis system; forming a layer of a piezoactive thin film on the substrate; baking the piezoactive thin film; and annealing the piezoactive thin film. |
| 地址 |
Taipei City TW |
