| 摘要 |
The present invention relates to an inspection jig for a multilayer substrate and, more specifically, to an inspection jig used in a UMR inspection method. The inspection jig for a multilayer substrate comprises: multiple coaxial probe pins; and a lower plate for a jig and an upper plate for a jig which support the coaxial probe pins. Since the inspection jig for a multilayer substrate uses the coaxial probe pins, a plate is separated by a partition wall with a narrow width, and pairs of jig holes are not necessary. Accordingly, the number of processes of jig holes is reduced to a half, difficulty of the hole jig process is significantly decreased, and it is possible to dramatically reduce hole process defects. Therefore, jig manufacturing costs are reduced, and the yield of a jig manufacturing process is remarkably raised. In addition, a separate printed circuit board for electric connection to a measurement device is not required. |
