| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide device configured to include an optical path conversion mirror in an optical waveguide without causing problems and to easily exhaust gas generated inside.SOLUTION: The optical waveguide device includes an insulating layer 30, a wiring substrate 1 provided with a wiring layer 22 on the insulating layer 30, an optical waveguide 40 on the wiring layer 22 and the insulating layer 30, a trench 40a at an edge of the optical waveguide 40 having an inclined surface S, an optical path conversion mirror M at the inclined surface S, and an opening G in the wiring layer 22 below the optical waveguide 40, the wiring layer 22 not being formed under the trench 40a. |
