CLEANING DEVICE AND SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To facilitate positioning of a nozzle.SOLUTION: A cooling device 35 includes: a block manifold 352; a nozzle 360; and a fixing structure 370. The block manifold 352 is disposed facing a polishing pad. A passage 354, in which a fluid for cooling the polishing pad flows, is formed in the block manifold 352. The nozzle 360 blows the fluid in the passage 354 to the polishing pad. The fixing structure 370 includes: a fixing plate 372 in which a fitting hole 374 for fitting the nozzle 360 therein and fixing the nozzle 360 is formed; and a bolt 378 for fixing the fixing plate 372 to the block manifold 352 with the nozzle 360 fitting in the fitting hole 374.