THERMAL INK JET CONVERTER AND MANUFACTURE THEREOF

摘要

PURPOSE: To provide a resistive heating element having structure and resistance more uniform than those of a conventional resistive heating element and a manufacturing method thereof. CONSTITUTION: A resistive heating element is formed by depositing an amorphous silicon film on selected portions of a substrate and heating the deposited amorphous silicon film so that it undergoes solid phase epitaxy to form a (111) textured polycrystalline silicon film. The method is particularly useful for forming electro-thermal transducer for thermal ink jet printheads.