AMORPHOUS CARBON FILM, METHOD FOR PRODUCING AMORPHOUS CARBON FILM, CONDUCTIVE MEMBER PROVIDED WITH AMORPHOUS CARBON FILM, AND FUEL CELL SEPARATOR

摘要

An amorphous carbon film contains carbon as a main component, not more than 30 at. % of hydrogen, not more than 20 at. % of nitrogen and not more than 3 at. % of oxygen (all excluding 0 at. %), and when the total amount of the carbon is taken as 100 at. %, the amount of carbon having an sp 2 hybrid orbital is not less than 70 at. % and less than 100 at. %. Nitrogen and oxygen are concentrated on a surface side of the film and when detected from a surface layer by X-ray photoelectron spectroscopy, oxygen content ratio is not less than 4 at. % and not more than 15 at. % and nitrogen content ratio is not less than 10 at. % and not more than 30 at. %. The amorphous carbon film attains both electric conductivity and hydrophilicity and exhibits suitable surface characteristics to a fuel cell bipolar plate, etc.